Micro Positioning Platform

1. Research Topic

< Micro Positioning Platform >


2. Research Contents

The Micro Positioning Platform actuated by a dual servo system was developed in 2004. This machine is based on a micro parallel kinematic structure that can make 3D micro shapes.


A. Parallel Mechanism
 The following figure shows the conceptual design of the developed parallel mechanism. End-effecter and actuator positions are triangular shaped. The first and second legs have identical chains, each consisting of a link that is connected to the end-effector by a universal joint and to the base plate by a passive revolute joint.  The last leg has a different chain which consists of a planar four-bar parallelogram connected to the end-effector and the base plate by universal joints. The parallelogram shaped third leg restrains the motion of the end-effector, so that the end-effector could only do x- and y- translation and rotation about the x- axis.
B. Dual Servo System
 A dual stage system has an advantage of having alarge workspace while still providing a high resolution. By using a dual stage system, we also can increase dynamic performances such as settling time or overshoot. For the vertical type we've selected a coarse actuator combination and for the horizontal type a fine actuator combination. Vertical coarse actuation was selected to increase tilting capability and horizontal fine actuation was selected to get higher resolution
C. Position/Orientation Sening Part
In order to obtain high accuracy, a sensing part for the system to get feedback of the position and orientation of end-effector is necessary. The feedback sensor data is used to control the platform accurately. We developed a sensing system by using 3 linear sensors. It is able to measure the 3 d.o.f. of the platform motion.

3. Publication

• Tae Won Seo, Hwa Soo Kim, Deuk Soo Kang, Jongwon Kim "Dual servo control of a 3-DOF High-tilt Micro Parallel Positioning Platform" IEEE/ASME transaction on mechatronics14615-625  2009 [PDF]

• Xin-Jun Liu, Jinsong Wang, Chao Wu and Jongwon Kim "A New Family of Spatial 3-DOF Parallel Manipulators with Two Translational and One Rotational DOFs" Robotica27241-247  2009 [PDF]

• Deuk Soo Kang, Mr. Tae Won Seo, Prof. Jongwon Kim "Development and kinematic calibration for measurement structure of a micro parallel mechanism platform" KSME International Journal 22746-754  2008 [PDF]

• Tae Won Seo, Hwa Soo Kim, Deuk Soo Kang, Jongwon Kim "Gain-Scheduled Robust Control of a 3-DOF Micro Parallel Positioning Platform via a Dual Stage Servo System" Mechatronics18495-505  2008 [PDF]

• Ahn, Changsun, Seo, Taewon, Kim, Jongwon, Kim, Tae-wan "High-tilt parallel positioning mechanism development and cutter path simulation for laser micro-machining " Computer-Aided Design 39218-228  2007 [PDF]

• D. S. Kang, T. W. Seo, Y. H. Yoon , B. S. Shin, X-J Liu , J. Kim "A Micro-positioning Parallel Mechanism Platform with 100-degree Tilting Capability" CIRP Annals55377-380  2006 [PDF]

• Xinjun Liu, Jinsong Wang, Jongwon Kim "Determination of the Link Lengths for a Spatial 3-DoF Parallel Manipulator" Journal of Mechanical Design128365-373  2006 [PDF]

• Xinjun Liu, Jongwon Kim "A New Spatial Three-DoF parallel Manipulator with High Rotational Capability" Transactions on Mechatronics10502-512  2005 [PDF]

• Kun-Ku Oh, Xin-Jun Liu, Deuk Soo Kang, and Jongwon Kim "Optimal design of a micro parallel positioning platform. Part II: Real machine design" Robotica 23109-122  2005 [PDF]

• Kun-Ku Oh, Xin-Jun Liu, Deuk Soo Kang, Jongwon Kim "Optimal Design Of A Micro Parallel Positioning Platform. Part I:Kinematic Analysis" Robotica22599-609  2004 [PDF]

• Xin-Jun Liu, Jinsong Wang, Kun-Ku Oh, and Jongwon Kim "A New Approach to the Design of a DELTA Robot with a desired workspace " Journal of Intelligent & Robotic Systems 39209-225  2004 [PDF]

• Xin-Jun Liu , Jay il Jeong, Jongwon Kim "A Three Translational DoFs Parallel Cube-Manipulator" Robotica 21645-653  2003 [PDF]

• Taewon Seo, Deuksoo Kang, Jongwon Kim "Synthesis and comparison of fine actuator controllers for a 3-DOF micro parallel positioning platform" 10th intl conf on cotnrol, automation, robotics and vision  2. 12 2008 [PDF]

• Taewon Seo, Deuksoo Kang, Jongwon Kim "GAIN-SCHEDULED ROBUST CONTROL FOR A FINE ACTUATION SYSTEM OF A 3-DOF MICRO PARALLEL POSITIONING PLATFORM" ISR 2008 (39th International Symposium on Robotics)  8. 08 2008 [PDF]

• T.W.Seo, H.S.Kim, Y.H.Yun, D.S.Kang, J.W.Kim "A Fine Actuation System Control for the Micro Positioning Parallel Mechanism Platform" ASPEN 2007  1. 11 2007 [PDF]

• Deuk Soo Kang, Tae Won Seo, Young Ha Yoon and Jongwon Kim "A Micro-positioning Platform with High Tilting Capability and Its Kinematic Calibration" International Conference on Positioning Technology  0. 10 2006 [PDF]

• 윤용하, 강득수, 서태원, 김홍석, 성태종, 김종원 "높은 회전성능(100˚)을 가지는 초정밀 위치결정용 마이크로 병렬기구 플랫폼의 개발" 한국정밀공학회  5. 05 2006 [PDF]

• D. S. Kang, T. W. Seo, J. Kim, X-J Liu, C. S. Ahn, Y. J. Kang "A Parallel Mechanism Micro-positioning Platform with a 100-degree Tilting Capability" The First International Conference on Precision Engineering and Micro/Nano Technology in Asia  1. 11 2005 [PDF]

• 강득수, 김종원 "마이크로 병렬기구 플랫폼의 기구학적 보정" 한국정밀공학회  0. 10 2004 [PDF]

• Xin-Jun Liu, Jay il Jeong, and Jongwon Kim, Deuk Soo Kang "A New Planar Two Degree-of-Freedom Parallel Mechanism" The 11th World Congress in Mechanism and Machine ScienceTianjin  4. 04 2004 [PDF]

• 오군규, 김종원 "초정밀 위치 결정용 마이크로 병렬기구 플랫폼의 구조설계(Architecture Design of a Micro Mechanism Platform for Ultra-Precision Positioning)" 한국정밀공학회  0. 10 2003 [PDF]

• Xin-Jun Liu, Jongwon Kim and Kun-Ku Oh "Singularity Analysis of the HALF Parallel Manipulator with Revolute Actuators" Proceedings of the 2003 IEEE International Conference on Robotics & AutomationTaipei  9. 09 2003 [PDF]

• Xin-Jun Liu, Jongwon Kim "A New Three-Degree-of-Freedom Parallel Manipulator" Proceedings of the 2002 IEEE international Conference on Robotics & Automation,Vol.2  5. 05 2002 [PDF]

• 김종원, Liu Xin-jun, 오군규 "3자유도 병렬기구를 이용한 미세운동기와 미세 부품 가공기(Micro-Motion Machine and Micro-Element Fabricating Machine Using 3 Degree of Freedom Parallel Mechanism)" 10-2002-0068549  

4. Researcher

Ph.D : Taewon Seo